This program recently launched a program to develop multi-type, low-volume system integrated circuit manufacturing technology. The total investment for this project is about 80 million U.S. dollars, and it is planned to develop a practical manufacturing system by 2003.
Ultra-advanced electronic technology development institutions said that this plan is mainly to develop low-cost, high-efficiency VLSI manufacturing systems. Specific projects include high-efficiency energy utilization technologies, energy-saving multi-variety manufacturing technologies, and high-precision process control technologies. . This technology will greatly increase the production efficiency of semiconductor components, reduce the size of the manufacturing plant and the amount of investment. Compared with the existing manufacturing equipment, it can reduce the water consumption from 50 tons to 3 tons, the manufacturing time from 500 hours to 250 hours, and the power consumption of each chip is reduced from 3-4 degrees to 1.2- 1.6 degrees, and the same accuracy of the product, the line width up to 0.13 microns.
Ultra-advanced electronic technology development institutions said that this plan is mainly to develop low-cost, high-efficiency VLSI manufacturing systems. Specific projects include high-efficiency energy utilization technologies, energy-saving multi-variety manufacturing technologies, and high-precision process control technologies. . This technology will greatly increase the production efficiency of semiconductor components, reduce the size of the manufacturing plant and the amount of investment. Compared with the existing manufacturing equipment, it can reduce the water consumption from 50 tons to 3 tons, the manufacturing time from 500 hours to 250 hours, and the power consumption of each chip is reduced from 3-4 degrees to 1.2- 1.6 degrees, and the same accuracy of the product, the line width up to 0.13 microns.